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MEMS enabled Fabry-Perot cavity for cQED experiments


Please use this identifier to cite or link to this item: http://hdl.handle.net/1928/12801

MEMS enabled Fabry-Perot cavity for cQED experiments

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Title: MEMS enabled Fabry-Perot cavity for cQED experiments
Author: Benito, Francisco Martin
Advisor(s): Leseman, Zayd Chad
Committee Member(s): Biedermann, Grant W.
Christodoulou, Christos
Department: University of New Mexico. Dept. of Electrical and Computer Engineering
Subject: MEMS actuator
MEMS thermal actuator
Optical Cavity
Cavity QED
Micro cavity
micro mirror
High Finesse
Strong coupling cavity
LC Subject(s): Optical MEMS.
Fabry-Perot interferometers.
Quantum electrodynamics.
Integrated optics.
Degree Level: Masters
Abstract: The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\%) micro-mirrors.
Graduation Date: May 2011
URI: http://hdl.handle.net/1928/12801

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