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Design fabrication and calibration of MEMS actuators for in-situ materials testing
Many MEMS devices utilize thin metallic films as mechanical structures. The elastic and plastic properties of these thin films (thickness < 1µm) are significantly different from those of the bulk material. At these scales ...
Characterization of the mechanical properties of freestanding platinum thin films
Many MEMS devices utilize nanocrystalline thin metallic films as mechanical structures, in particular, micro switching devices where these films are used as Ohmic contacts. But the elastic and plastic properties of these ...