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High quality factor silicon nitride ring resonators for biological sensing

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1928/10853

High quality factor silicon nitride ring resonators for biological sensing

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Title: High quality factor silicon nitride ring resonators for biological sensing
Author: Wright, Jeremy
Advisor(s): Lester, Luke
Committee Member(s): Hossein-Zadeh, Mani
Brener, Igal
Department: University of New Mexico. Dept. of Electrical and Computer Engineering
Subject(s): Sensing
Silicon Photonics
Resonators
LC Subject(s): Microresonators (Optoelectronics)
Biosensors.
Refractive index--Measurement.
Silicon nitride.
Degree Level: Masters
Abstract: Recent improvements in silicon photonics have led to high quality factor planar resonant cavities that are well suited for a variety of applications where high sensitivity to a physical parameter (i.e. temperature, refractive index, etc…) is needed. One such application for these high quality factor ring resonators is sensitive refractive index sensors. The author of this examination helped demonstrate chemical/biological sensor arrays based on high quality factor evanescent microring waveguide resonators in a process that is compatible with CMOS fabrication, glass microfluidic integration, and robust surface chemistry ligand attachment. Through a differential dual sensor design, fluctuations due to liquid temperature variations are canceled out and by using laser locking servo techniques, detection sensitivities in the ng/ml range have been obtained. Efforts in packaging have led to a robust design that directly incorporates a microfluidic interface. This combination of silicon photonic sensors, robust packaging, large sensitivity and arrayed design are capable of providing a promising platform for multiplexed chemical/biological sensing.
Graduation Date: May 2010
URI: http://hdl.handle.net/1928/10853

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